The M-estimation determination method allowing to merease the noise immunity of processing of samplings of multiple observation clogged by blunders with unknown distribution law is described. The suggested approach is applied to computation of M-estimation with Tuki weight function.

the maximum relative deviation from the mean value of the pitch of test structure does not exceed 0,4%.

Interference computer profilometer PIC-30M developed by All-Russian Research Institute of Optical and Physical Measurements (VNIIOFI) is presented. Profilometer is designed to measure the height of the surface profile of reflective objects in the micro- and nanoscale, the curvature radius of the spherical mirror from 2000 to 7000 mm. The diameter of the objects not exceeding 30 mm.

S) are presented.

The method of minimization of temperatures influences on capacitance thin-film nano- and microelectromechanical systems and sensors on the base is offered.