Based on piecewise-linear approximation of operational characteristic of the decision function defining the efficiency of evaluating a product characterized byscalar quantity, methods of generating limitations to ensure the observation of set requirements for unconditional probability of 1^st and 2^nd type errors have been developed.

These studies were performed on a test step relief structure of mono crystalline silicon. There was experimentally measured the thickness of the natural oxide on this structure consisting of a set of elements (protrusions) with a trapezoidal profile and 2,0 μm step size, upper base about 10 nm, height about 500 nm. The tilt angle of side face with respect to the lower base was 54,7°. The entire structure was covered with a natural oxide film that appeared at room temperature, the thickness of which is being measured using a transmission electron microscope with atomic resolution by the observed pattern in the direct mode resolution of the crystal structure. In order to calibrate the measurements there was used a distance between {111} planes.

Estimation of the limits of systematic inaccuracy of measuring of individual heat energy consumption by the original method based on the using of high-accuracy intellectual temperature transducers with wireless interface was carried out.

The new method of separate definition of parameters of two-element bipolar electric circuits on instant values of two transients is considered. The variant of the device realizing a method is offered. Results of the analysis of influence of quantization of instant values of transients on an error of measurement of parameters are considered.

Technical realization of a method of digital/analog conversion at which conversion errors, such as nonlinearity of the characteristic and establishment time in comparison with the transformers fulfilled on the basis of classical conversion with pulse width modulation essentially decrease is described.