The general method for evaluating the uncertainty of indirect measurements is proposed. It is shown how to find offset and gain errors using the maximum error and the nonlinearity of a measuring instrument. Examples of decreasing the uncertainty of indirect measurements due to the correct choices of architectures, measurement ranges and the methods of rationing are given.

A method of calibration of a nanometer linewidth measure using the atom-based dimension standard imaged in a TEM is considered. Set of geometric parameters defining a protrusion profile at a TEM image is discovered to contribute to uncertainty of linewidth measured as the only parameter (and also to linewidth difference obtained by using of SEM and TEM) of order of 10 nm. Inperfections of used linewidth calculation model for SEM are the most important contribution in the value difference. Discovery of a host of protrusion geometric parameters leads to an accidental character of linewidth values obtained with help of the calculation model deals with only one parameter. Lacking of protrusion edge roughness consideration is one more source of linewidth uncertainty.

The principle of constructing code scales on the basis of binary sequences de Bruyn with a minimum length of the period is proposed. It is shown that such scales allow on that basis to build of the digital angle converters, which, compared to converters based on the Gray code scale, have smaller dimensions. The developed scales allow to create on their basis the converters with output code from 6 to 12 binary bits without usage of additional technical solution such as the interpolator.

The design method of digital precise linear-angle movements measuring instruments with use of small-period optical measures, multiplicative transducers of scanning compensatory guidance control interpolators and universal signal processing system.

This article describes the process of production proportional electromagnet actuators and proved the need for process control. Process control is proposed to carry out using the method of principal component analysis to the weber-ampere characteristics of the operating cycle of the electromagnetic actuators. The method of principal component analysis allows to reveal latent characteristics and at the same time to reduce the dimensionality of the original data, sacrificing a meaningless information. We consider the experimental results obtained by the use of principal component analysis to the weber-ampere characteristics of the operating cycle with various defects.

A technique for smoothing window function parameters determination is proposed. This function is applied in problems of impulse spectroscopy. A technique is based on coupling of the window to spectral and energy center of pulse signal founded from the signal’s spectrogram.

The results of experimental investigations of radar-absorbent materials reflectivity by sounding of ultra-short electromagnetic pulses (impulse spectroscopy in microwave range) are presented. Comparing with results obtained by conventional narrowband technique is carried out.