Основные физические эффекты, влияющие на формирование неопределенности измерений параметров рельефа поверхностив нанометровом диапазоне размеров

Abstract

The main physical effects inherent in the surface layer of measured object influencing the formation of the measurements of surface texture and topography uncertainty in nanometer size range are considered. It is shown that the quantum size effect is typical for small clusters (0,5–2,0 nm) and is coupled with the discreteness of energy spectrum of electrons in crystal incipient when the system characteristic beco