Conditions of measurement of protrusion linewidth by scanning and transmission microscopes in a range of less 50 nanometers

Abstract

Possible difference in values of linewidth which can be obtained at measurements of a protrusion by scanning and transmission electron microscopes is produced. Contribution of potential sources of errors capable to induce a possible value difference is evaluated for the both instruments. The most important source of value difference is occurs to be discrepancies of the model of the linear measurements used for a scanning electron microscope. Its further enhance is limited so calibration of these measurements with use of a transmission microscope is needed. Linewidth measurements with use of a transmission microscope are lead to an error also. They are resulting due to a multitude of details of a real form of protrusion profile that affect the linewidth size so that consideration of its influence is complicated. An application of simplified model of profile form leads to an error also. As a result the overall size difference of a protrusion linewidth due to the both model shortcomings can be 1-20 nanometers.