metrolМетрологияMetrologiya0132-47132712-9071ВНИИМСmetrol-309Research ArticleОПТИКО-ФИЗИЧЕСКИЕ ИЗМЕРЕНИЯВысокодобротные оптические микрорезонаторы с модами типа шепчущей галереи и их применение в прецизионных измеренияхГородецкийМ. Л.noemail@neicon.ruДемченкоЮ. А.noemail@neicon.ruЗайцевД. Ф.noemail@neicon.ruКрутиковВ. Н.noemail@neicon.ruЗолотаревскийЮ. М.noemail@neicon.ruЛясковскийВ. Л.noemail@neicon.ruМосковский государственный университет им. М. В. ЛомоносоваRussian FederationОАО «Корпорация «Фазотрон - НИИР»Russian FederationНациональный исследовательский университет «Высшая школа экономики»Russian FederationВсероссийский научно-исследовательский институт оптико-физических измеренийRussian Federation2014070220230122240Copyright © ВНИИМС, 20232023ВНИИМСВНИИМСhttps://metrol.elpub.ru/jour/about/submissions#copyrightNoticehttps://metrol.elpub.ru/jour/article/view/309

Представлены основные сведения об оптических диэлектрических микрорезонаторах с модами типа шепчущей галереи. Описаны их свойства, технологии изготовления, области применения, а также наиболее важные достижения последнего времени. Такие микрорезонаторы могут быть использованы в высокостабильных источниках СВЧ-сигналов и оптических частотных гребенках, позволяющих связывать эталоны частот оптического и радиодиапазонов.

The basic information about optical dielectric microresonators with whispering gallery type modes is presented. The manufacturing methods, applications, and a brief history of the most important last time achievements in this rapidly developing area are described. Such microresonators can be used in highly stable sources of microwave signals and optical frequency comb generators allowing to link the optical and radio frequency standards.

оптические микрорезонаторымоды типа шепчущей галлереиoptical microresonatorswhispering gallery type modesReferencesBraginsky V. B., Gorodetsky M. L., Ilchenko V. S. Quality-factor and nonlinear properties of optical whispering-gallery modes // Phys. Lett. A. 1989. № 137. P. 393-397.Braginsky V. B., Gorodetsky M. L., Ilchenko V. S. Quality-factor and nonlinear properties of optical whispering-gallery modes // Phys. Lett. A. 1989. № 137. P. 393-397.Городецкий М. Л. Оптические микрорезонаторы с гигантской добротностью. М.: Физматлит, 2011.Городецкий М. Л. Оптические микрорезонаторы с гигантской добротностью. М.: Физматлит, 2011.Gorodetsky M. L., Ilchenko V. S., Savchenkov A. A. Ultimate Q of optical microsphere resonators // Opt. Lett. 1996. № 21. P. 453-455.Gorodetsky M. L., Ilchenko V. S., Savchenkov A. A. Ultimate Q of optical microsphere resonators // Opt. Lett. 1996. № 21. P. 453-455.Savchenkov A. A. e. a. Optical resonators with ten million finesse // Opt. Express. 2007. V.15., P. 6768-6773.Savchenkov A. A. e. a. Optical resonators with ten million finesse // Opt. Express. 2007. V.15., P. 6768-6773.Pat. US8057283B1 USA. Method of fabrication of whispering gallery microresonators / Savchenkov A. A. e. a. // 2011.Pat. US8057283B1 USA. Method of fabrication of whispering gallery microresonators / Savchenkov A. A. e. a. // 2011.Ilchenko V. S., Maleki L. Novel whispering-gallery resonators for lasers, modulators, and sensors // Laser resonators IV: Proc. SPIE. V.4270. San Jose, CA, 2001. P. 120-130.Ilchenko V. S., Maleki L. Novel whispering-gallery resonators for lasers, modulators, and sensors // Laser resonators IV: Proc. SPIE. V.4270. San Jose, CA, 2001. P. 120-130.Pat. US 6473218 B1 USA. Light modulation in whispering-gallery mode resonators // Maleki L. e. a. // 2002.Pat. US 6473218 B1 USA. Light modulation in whispering-gallery mode resonators // Maleki L. e. a. // 2002.Grudinin I. S. e. a. Ultra high Q crystalline microcavities // Opt. Commun. 2006. № 265. V. 33-38.Grudinin I. S. e. a. Ultra high Q crystalline microcavities // Opt. Commun. 2006. № 265. V. 33-38.Grudinin I. S., Ilchenko V. S., Maleki L. Ultrahigh optical Q factors of crystalline resonators in the linear regime // Phys. Rev. A. 2006. № 74. Article Number: 063806.Grudinin I. S., Ilchenko V. S., Maleki L. Ultrahigh optical Q factors of crystalline resonators in the linear regime // Phys. Rev. A. 2006. № 74. Article Number: 063806.Garrett,C. G. Kaiser B W., Bond W. L. Stimulated emission into optical whispering gallery modes of spheres // Phys. Rev. 1961. № 124. P. 1807-1809.Garrett,C. G. Kaiser B W., Bond W. L. Stimulated emission into optical whispering gallery modes of spheres // Phys. Rev. 1961. № 124. P. 1807-1809.Lin G. e. a. High-Q UV whispering-gallery mode resonators made of angle-cut BBO crystals // Opt. Express. 2012. V. 19. № 20. P. 21372-21378.Lin G. e. a. High-Q UV whispering-gallery mode resonators made of angle-cut BBO crystals // Opt. Express. 2012. V. 19. № 20. P. 21372-21378.Chen T. e. a. Chemically etched ultrahigh-Q wedge-resonator on a silicon chip // Nature Photon. 2012. № 6. P. 369-373.Chen T. e. a. Chemically etched ultrahigh-Q wedge-resonator on a silicon chip // Nature Photon. 2012. № 6. P. 369-373.Borselli M., Johnson Th. J., Painter O. Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment // Opt. Express. 2005. V. 5. № 13. P. 1515-1530.Borselli M., Johnson Th. J., Painter O. Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment // Opt. Express. 2005. V. 5. № 13. P. 1515-1530.Niehusmann J. e. a. Ultrahigh-quality-factor silicon-on-insulator microring resonator // Opt. Lett. 2004. V. 24. № 29. P. 2861-2863.Niehusmann J. e. a. Ultrahigh-quality-factor silicon-on-insulator microring resonator // Opt. Lett. 2004. V. 24. № 29. P. 2861-2863.Guarino A. e. a. Electro-optically tunable microring resonators in lithium niobate // Nature photon. 2007. №1. P. 407-410.Guarino A. e. a. Electro-optically tunable microring resonators in lithium niobate // Nature photon. 2007. №1. P. 407-410.Ulliac G. e. a. Ultra-smooth LiNbO3 micro and nano structures for photonic applications // Microelectronic Engineering. 2011. № 88. P. 2417-2419.Ulliac G. e. a. Ultra-smooth LiNbO3 micro and nano structures for photonic applications // Microelectronic Engineering. 2011. № 88. P. 2417-2419.Sugiyama M. e. a. Low-drive voltage LiNbO3 40-Gb/s modulator // IEEE LEOS news letter. 2003. № 17. P. 12-13.Sugiyama M. e. a. Low-drive voltage LiNbO3 40-Gb/s modulator // IEEE LEOS news letter. 2003. № 17. P. 12-13.Gordon E. I., Rigden J. D. The Fabry-Perot electo-optic modulator // Bell Syst. Tech. J. 1963. Jan. P. 155-179.Gordon E. I., Rigden J. D. The Fabry-Perot electo-optic modulator // Bell Syst. Tech. J. 1963. Jan. P. 155-179.Hossein-Zadeh M. Photonic microwave receivers based on high-Q optical resonance // Laser Resonators, Microresonators, and Beam Control XIV: Proc. SPIE. San Francisco (CA). 2012 Т. 8236. P. 82360 T1-10.Hossein-Zadeh M. Photonic microwave receivers based on high-Q optical resonance // Laser Resonators, Microresonators, and Beam Control XIV: Proc. SPIE. San Francisco (CA). 2012 Т. 8236. P. 82360 T1-10.Cohen D.A., Hossein-Zadeh M., Levi A.F.J. High-Q microphotonic electro-optic modulator // Solid-State Electronics. 2001. № 45. P. 1577-1589.Cohen D.A., Hossein-Zadeh M., Levi A.F.J. High-Q microphotonic electro-optic modulator // Solid-State Electronics. 2001. № 45. P. 1577-1589.Strekalov D. V. e. a. Efficient upconversion of subterahertz radiation in a high-Q whispering gallery resonator // Opt. Lett. 2009. № 34. V. 6. P. 713-715.Strekalov D. V. e. a. Efficient upconversion of subterahertz radiation in a high-Q whispering gallery resonator // Opt. Lett. 2009. № 34. V. 6. P. 713-715.Ayazi A. e. a. All dielectric photonic-assisted wireless receiver // Opt. Express. 2008. V. 3. № 16. P. 1742-1747.Ayazi A. e. a. All dielectric photonic-assisted wireless receiver // Opt. Express. 2008. V. 3. № 16. P. 1742-1747.Matsko A. B., Savchenkov A. A., Ilchenko V. S. On the sensitivity of all-dielectric microwave photonic receivers // J. Lightwave Technol. 2010. № 28. V. 23. P. 3427-3438.Matsko A. B., Savchenkov A. A., Ilchenko V. S. On the sensitivity of all-dielectric microwave photonic receivers // J. Lightwave Technol. 2010. № 28. V. 23. P. 3427-3438.Pat. US9095012B12012 USA. High spur-free dynamic range receiver / Th. W. Karras, A. C. Kowalczyk // Jan. 2010.Pat. US9095012B12012 USA. High spur-free dynamic range receiver / Th. W. Karras, A. C. Kowalczyk // Jan. 2010.Yao X. S., Maleki L. Optoelectronic microwave oscillator // J. Opt. Soc. Am. В. 1996. № 13. P. 1725-1735.Yao X. S., Maleki L. Optoelectronic microwave oscillator // J. Opt. Soc. Am. В. 1996. № 13. P. 1725-1735.Ji Y., Yao X. S., Maleki L. Compact optoelectronic oscillator with ultralow phase noise performance // Electron. Lett. 1999. № 35. P. 1554-1555.Ji Y., Yao X. S., Maleki L. Compact optoelectronic oscillator with ultralow phase noise performance // Electron. Lett. 1999. № 35. P. 1554-1555.Davidson T. e. a. High spectral purity CW oscillation and pulse generation in optoelectronic microwave oscillator // Electron. Lett. 1999. № 35. P. 1260-1261.Davidson T. e. a. High spectral purity CW oscillation and pulse generation in optoelectronic microwave oscillator // Electron. Lett. 1999. № 35. P. 1260-1261.Fiedziuszko S. J. e. a. Dielectric materials, devices, and circuits // IEEE Trans. Microw. Theory Tech. 2002. № 50. P. 706-720.Fiedziuszko S. J. e. a. Dielectric materials, devices, and circuits // IEEE Trans. Microw. Theory Tech. 2002. № 50. P. 706-720.Strekalov D. e. a. Stabilizing an optoelectronic microwave oscillator with photonic filters // J. Lightwave Technol. 2003. № 21. P. 3052-3061.Strekalov D. e. a. Stabilizing an optoelectronic microwave oscillator with photonic filters // J. Lightwave Technol. 2003. № 21. P. 3052-3061.Matsko A. B. e. a. Whispering gallery mode based optoelectronic microwave oscillator // J. Mod. Opt. 2003. № 50. P. 2523-2542.Matsko A. B. e. a. Whispering gallery mode based optoelectronic microwave oscillator // J. Mod. Opt. 2003. № 50. P. 2523-2542.Savchenkov A. e. a. Whispering-gallery mode based opto-electronic oscillators // IEEE International Frequency Control Symposium. Newport Beach, CA. 2010. P. 554-557.Savchenkov A. e. a. Whispering-gallery mode based opto-electronic oscillators // IEEE International Frequency Control Symposium. Newport Beach, CA. 2010. P. 554-557.Kossakovski D. e. a. Multi-wavelength optical source at 12.5 GHz optical spacing based on a coupled optoelectronic oscillator witha whispering gallery mode resonator // Laser Resonators and Beam Control VII: Proc. SPIE. San Jose (CA). 2004. V. 5333. P. 167-173.Kossakovski D. e. a. Multi-wavelength optical source at 12.5 GHz optical spacing based on a coupled optoelectronic oscillator witha whispering gallery mode resonator // Laser Resonators and Beam Control VII: Proc. SPIE. San Jose (CA). 2004. V. 5333. P. 167-173.Maleki L. e. a. Tunable delay line with interacting whispering-gallery-mode resonators // Opt. Lett. 2004. № 29. V. 6. P. 626-628.Maleki L. e. a. Tunable delay line with interacting whispering-gallery-mode resonators // Opt. Lett. 2004. № 29. V. 6. P. 626-628.Matsko A.A., Savchenkov A.B., Strekalov, D. e. a. Low threshold optical oscillations in a whispering gallery mode CaF2 resonator // Phys. Rev. Lett. 2004. № 93. Article Number: 243905.Matsko A.A., Savchenkov A.B., Strekalov, D. e. a. Low threshold optical oscillations in a whispering gallery mode CaF2 resonator // Phys. Rev. Lett. 2004. № 93. Article Number: 243905.Matsko A. B. e. a. Optical hyperparametric oscillations in a whispering-gallery-mode resonator: Threshold and phase diffusion // Phys. Rev. A. 2005. № 71. Article Number: 033804(10).Matsko A. B. e. a. Optical hyperparametric oscillations in a whispering-gallery-mode resonator: Threshold and phase diffusion // Phys. Rev. A. 2005. № 71. Article Number: 033804(10).Kippenberg T. J., Holzwarth R., Diddams S. A. Microresonator-Based Optical Frequency Combs // Science. 2011. № 332. V. 6029. P. 555-559.Kippenberg T. J., Holzwarth R., Diddams S. A. Microresonator-Based Optical Frequency Combs // Science. 2011. № 332. V. 6029. P. 555-559.

The authors declare that there are no conflicts of interest present.